Invention Grant
- Patent Title: Substrate cleaning apparatus
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Application No.: US13963743Application Date: 2013-08-09
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Publication No.: US09643215B2Publication Date: 2017-05-09
- Inventor: Seung-Jun Lee , Jung-Hwa You , Sohra Hahn , Dong-Myung Shin
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: KR10-2012-0104565 20120920
- Main IPC: B08B1/02
- IPC: B08B1/02 ; B08B1/04 ; B08B3/04 ; H01L21/677 ; H01L21/67 ; B08B1/00
Abstract:
A substrate cleaning apparatus is provided. The substrate cleaning apparatus includes a plurality of transfer rollers for transferring a substrate; a liquid chemical feeder supplying a liquid chemical to a first surface of the substrate; wherein the liquid chemical feeder comprises a first housing and a first cleaning roller rotatably installed within the housing and having an upper portion configured to contact with the substrate.
Public/Granted literature
- US20140075690A1 SUBSTRATE CLEANING APPARATUS Public/Granted day:2014-03-20
Information query
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