Invention Grant
- Patent Title: Cleaning device, method of manufacturing the same and substrate cleaning apparatus
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Application No.: US14944551Application Date: 2015-11-18
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Publication No.: US09643216B2Publication Date: 2017-05-09
- Inventor: Tomoatsu Ishibashi
- Applicant: Ebara Corporation
- Applicant Address: JP Tokyo
- Assignee: Ebara Corporation
- Current Assignee: Ebara Corporation
- Current Assignee Address: JP Tokyo
- Agency: Leydig, Voit & Mayer, Ltd.
- Priority: JP2014-235191 20141120
- Main IPC: B08B1/04
- IPC: B08B1/04 ; B08B11/00 ; H01L21/00 ; H01L21/67 ; A46B9/00 ; A46B13/02

Abstract:
A cleaning device, according to one embodiment, for cleaning a substrate by being rotated, includes: a cleaning member configured to clean a substrate; and a sleeve configured to be provided along a circumference of the cleaning member, a lower part of the sleeve being divided into a plurality of chucking claws each of which holds a portion of a side face of the cleaning member, wherein at inside of each of the plurality of chucking claws, a plurality of protrusions are provided substantially parallel to a rotation direction of the cleaning member, an end of each of the plurality of protrusions is configured to contact the side face of the cleaning member.
Public/Granted literature
- US20160144410A1 CLEANING DEVICE, METHOD OF MANUFACTURING THE SAME AND SUBSTRATE CLEANING APPARATUS Public/Granted day:2016-05-26
Information query
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