Invention Grant
- Patent Title: Laser processing apparatus
-
Application No.: US14085280Application Date: 2013-11-20
-
Publication No.: US09643280B2Publication Date: 2017-05-09
- Inventor: Doh-Hyoung Lee , Choong-Ho Lee , Sung-Sik Yun , Tong-Jin Park , Arnold Gillner , Nelli Hambach , Stephan Eifel , Jens Holtkamp , Lasse Büsing , Alexander Gatej
- Applicant: Samsung Display Co., Ltd. , Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
- Applicant Address: KR Samsung-ro, Giheung-Gu, Yongin-si, Gyeonggi-Do DE Munich
- Assignee: Samsung Display Co., Ltd.,FRAUNHOFER-GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
- Current Assignee: Samsung Display Co., Ltd.,FRAUNHOFER-GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
- Current Assignee Address: KR Samsung-ro, Giheung-Gu, Yongin-si, Gyeonggi-Do DE Munich
- Agent Robert E. Bushnell, Esq.
- Priority: KR10-2012-0131866 20121120
- Main IPC: H01S3/10
- IPC: H01S3/10 ; B23K26/06 ; G02B27/09 ; G02B26/08 ; B23K26/38 ; B23K26/066

Abstract:
A laser processing apparatus includes: a laser generator that generates a laser beam, a diffractive optical element that divides the laser beam generated by the laser generator into a plurality of sub-laser beams, and a beam gap adjustor that adjusts a gap between neighboring ones of the plurality of sub-laser beams. Therefore, by installing a diffractive optical element that divides a laser beam that is generated by the laser generator into the plurality of sub-laser beams and a beam gap adjustor to adjust a gap between a plurality of sub-laser beams, the laser processing apparatus can form a processing pattern of various resolutions in a shadow mask while improving a processing speed of the shadow mask.
Public/Granted literature
- US20140177055A1 LASER PROCESSING APPARATUS Public/Granted day:2014-06-26
Information query