Invention Grant

Polishing method
Abstract:
A polishing method comprising: arranging a polishing tool and a workpiece on lower and upper shaft sides of a polishing device, respectively, the polishing tool including: a polishing surface having a spherical zone shape; and a hole that is provided inside the polishing surface and concentric with an outer edge of the polishing surface around a rotation axis on a projection plane orthogonal to the rotation axis, a ratio of an outer diameter of the polishing surface to an inner diameter of the polishing surface being greater than 1.0 and 6.0 or less; and swinging the polishing tool relative to a reference point while rotating the polishing tool around the rotation axis. The reference point is positioned where a straight line, which passes through a center of the workpiece and intersects with the rotation axis, passes through a center of a spherical zone of the polishing surface in width direction.
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