Invention Grant
- Patent Title: Method for producing a pressure sensor and corresponding sensor
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Application No.: US14383092Application Date: 2013-03-06
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Publication No.: US09643836B2Publication Date: 2017-05-09
- Inventor: Sebastiano Brida , Jean-Francois Le Neal
- Applicant: AUXITROL S.A. , CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS)
- Applicant Address: FR Bourges FR Paris
- Assignee: AUXITROL S.A.,CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS)
- Current Assignee: AUXITROL S.A.,CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS)
- Current Assignee Address: FR Bourges FR Paris
- Agency: Blakely Sokoloff Taylor & Zafman LLP
- Priority: FR1252042 20120306
- International Application: PCT/EP2013/054531 WO 20130306
- International Announcement: WO2013/131973 WO 20130912
- Main IPC: H01S4/00
- IPC: H01S4/00 ; G01R3/00 ; B81B3/00 ; G01L9/04 ; G01L9/06 ; B81C1/00 ; B32B38/08 ; B81B7/02 ; G01L7/08 ; G01L9/00 ; G01L19/14 ; B81B7/00 ; G01L19/00

Abstract:
The invention relates to a method for producing a pressure sensor, comprising the following steps: assembling a support substrate with a deformable membrane on which strain gauges have been deposited, wherein the deformable membrane comprises a thinned area at the center thereof, the support substrate is disposed on top of the deformable membrane, the support substrate comprises an upper surface and a lower surface in contact with the deformable membrane, and the support substrate also comprises lateral recesses arranged on top of the strain gauges and a central recess arranged on top of the thinned area of the membrane, so as to obtain a micromechanical structure; and, once the assembly has been obtained, depositing, in a single step, at least one conductive material on the upper surface of the support and in the lateral recesses of the support, said conductive material extending into the recesses in order to be in contact with the strain gauges so as to form electrical contacts in contact with the strain gauges.
Public/Granted literature
- US20150033878A1 METHOD FOR PRODUCING A PRESSURE SENSOR AND CORRESPONDING SENSOR Public/Granted day:2015-02-05
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