Invention Grant
- Patent Title: Apparatus and method of manufacturing display device
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Application No.: US14830670Application Date: 2015-08-19
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Publication No.: US09644258B2Publication Date: 2017-05-09
- Inventor: Youmin Cha , Sangho Yun , Sungwoong Joo
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: Lewis Roca Rothgerber Christie LLP
- Priority: KR10-2015-0023148 20150216
- Main IPC: H01L51/00
- IPC: H01L51/00 ; H01L21/687 ; H01L21/677 ; C23C14/24 ; H01L21/67 ; C23C14/04 ; C23C14/56

Abstract:
An apparatus for manufacturing a display device, the apparatus including a loading chamber configured to receive a substrate from outside, a transfer chamber connected to the loading chamber and including a robot arm configured to transport the substrate, a deposition chamber connected to the transfer chamber and configured to deposit a deposition material onto the substrate after the substrate is transported to the deposition chamber from the transfer chamber, a mask supply chamber connected to the deposition chamber and configured to supply, to the deposition chamber, one of a plurality of masks stacked in the mask supply chamber, and a station connected to the mask supply chamber and configured to supply the plurality of masks, one by one, to the mask supply chamber.
Public/Granted literature
- US20160240403A1 APPARATUS AND METHOD OF MANUFACTURING DISPLAY DEVICE Public/Granted day:2016-08-18
Information query
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