Invention Grant
- Patent Title: Method for synthesis of transition metal chalcogenide
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Application No.: US14932668Application Date: 2015-11-04
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Publication No.: US09644263B2Publication Date: 2017-05-09
- Inventor: Hyungjun Kim , Youngjun Kim , Jeong-Gyu Song , Jusang Park
- Applicant: Industry-Academic Cooperation Foundation, Yonsei University
- Applicant Address: KR Seoul
- Assignee: INDUSTRY-ACADEMIC COOPERATION FOUNDATION, YONSEI UNIVERSITY
- Current Assignee: INDUSTRY-ACADEMIC COOPERATION FOUNDATION, YONSEI UNIVERSITY
- Current Assignee Address: KR Seoul
- Agency: Procopio, Cory, Hargreaves & Savitch LLP
- Priority: KR10-2014-0152288 20141104
- Main IPC: C23C16/30
- IPC: C23C16/30 ; C01G39/06 ; C23C16/52 ; H01L21/02 ; C23C16/455

Abstract:
Disclosed is a method for synthesizing a transition metal chalcogenide, in which a transition metal chalcogenide is synthesized on a substrate by atomic layer deposition to sequentially supply a precursor of the transition metal chalcogenide and a reactant so as to have a predetermined synthesis thickness, the transition metal chalcogenide is synthesized at a process temperature of 450° C. or higher and 1000° C. or lower, and the transition metal chalcogenide is synthesized at a process temperature corresponding to the predetermined synthesis thickness.
Public/Granted literature
- US20160122868A1 METHOD FOR SYNTHESIS OF TRANSITION METAL CHALCOGENIDE Public/Granted day:2016-05-05
Information query
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