Invention Grant
- Patent Title: Silicon carbide single crystal manufacturing apparatus
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Application No.: US14126520Application Date: 2012-07-24
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Publication No.: US09644286B2Publication Date: 2017-05-09
- Inventor: Kazukuni Hara
- Applicant: Kazukuni Hara
- Applicant Address: JP Kariya
- Assignee: DENSO CORPORATION
- Current Assignee: DENSO CORPORATION
- Current Assignee Address: JP Kariya
- Agency: Posz Law Group, PLC
- Priority: JP2011-165719 20110728
- International Application: PCT/JP2012/004699 WO 20120724
- International Announcement: WO2013/014920 WO 20130131
- Main IPC: C30B25/08
- IPC: C30B25/08 ; C30B25/10 ; C30B25/14 ; C30B29/36 ; C30B25/12

Abstract:
A silicon carbide single crystal manufacturing apparatus includes a vacuum chamber, a pedestal on which a seed crystal is disposed, an inlet of source gas, a reaction chamber extending from a bottom surface of the vacuum chamber toward the pedestal, a first heating device disposed around an outer periphery of the reaction chamber, a second heating device disposed around an outer periphery of the pedestal, and an outlet disposed outside the first and second heating devices in the vacuum chamber. After the source gas supplied from the reaction chamber is supplied toward the pedestal, the source gas is let flow outward in a radial direction of the silicon carbide single crystal between the reaction chamber and the silicon carbide single crystal and is discharged through the outlet.
Public/Granted literature
- US20140123901A1 SILICON CARBIDE SINGLE CRYSTAL MANUFACTURING APPARATUS Public/Granted day:2014-05-08
Information query
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