Invention Grant
- Patent Title: Current measurement system
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Application No.: US13539585Application Date: 2012-07-02
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Publication No.: US09644995B2Publication Date: 2017-05-09
- Inventor: Cor Verburg , Robert Mossel , Kaustubh Prabodh Padhye , Eric de Kok , Willem Jacob Vis
- Applicant: Cor Verburg , Robert Mossel , Kaustubh Prabodh Padhye , Eric de Kok , Willem Jacob Vis
- Applicant Address: NL Delft
- Assignee: MAPPER LITHOGRAPHY IP B.V.
- Current Assignee: MAPPER LITHOGRAPHY IP B.V.
- Current Assignee Address: NL Delft
- Agency: Hoyng Monegier LLP
- Agent David P. Owen
- Main IPC: G01R31/08
- IPC: G01R31/08 ; G01R31/02 ; G01D5/24 ; G03F9/00

Abstract:
A measurement system for measuring an input electrical current (Ics) from a current source (CS) and generating a current measurement signal, comprising a current measuring circuit (70) having a first input terminal (72) connected to the current source and an output terminal (74) for providing the current measurement signal. The current measuring circuit further comprises one or more power supply terminals (75, 76) arranged to receive one or more voltages from a power supply (77a, 77b) for powering the current measuring circuit. The current measuring circuit also comprises a first voltage source (VD) coupled to the one or more power supply terminals, the first voltage source providing a disturbance voltage to the one or more power supply terminals, the disturbance voltage representing a voltage at the first input terminal.
Public/Granted literature
- US20130009626A1 CURRENT MEASUREMENT SYSTEM Public/Granted day:2013-01-10
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