Invention Grant
- Patent Title: Resistive pressure sensor including piezo-resistive electrode
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Application No.: US14478755Application Date: 2014-09-05
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Publication No.: US09645028B2Publication Date: 2017-05-09
- Inventor: Chwee Lin Choong , Jongjin Park , Jihyun Bae , Byoungsun Lee , Jungkyun Im
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Sughrue Mion, PLLC
- Priority: KR10-2013-0106824 20130905
- Main IPC: G01L9/00
- IPC: G01L9/00 ; G01L1/22

Abstract:
Provided is a pressure sensor including an elastic thin film including a first surface and a second surface that face each other, the elastic thin film including an elastomer material, a plurality of protruding deformable structures patterned on the first surface; a piezoresistive electrode formed along surfaces of the plurality of protruding deformable structures; and a counter electrode disposed to face the piezoresistive electrode.
Public/Granted literature
- US20150059486A1 RESISTIVE PRESSURE SENSOR INCLUDING PIEZO-RESISTIVE ELECTRODE Public/Granted day:2015-03-05
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