Invention Grant
- Patent Title: QCM sensor
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Application No.: US14099262Application Date: 2013-12-06
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Publication No.: US09645115B2Publication Date: 2017-05-09
- Inventor: Sachiko Tanabe , Masayuki Suda , Hiroshi Muramatsu
- Applicant: SEIKO INSTRUMENTS INC.
- Applicant Address: JP
- Assignee: SEIKO INSTRUMENTS INC.
- Current Assignee: SEIKO INSTRUMENTS INC.
- Current Assignee Address: JP
- Agency: Adams & Wilks
- Priority: JP2012-274508 20121217; JP2013-185293 20130906
- Main IPC: G01N29/036
- IPC: G01N29/036 ; G01N29/02

Abstract:
A QCM sensor for detecting a physical quantity of a sample includes a quartz crystal vibrator for measurement, a quartz crystal vibrator for reference, and a housing accommodating the quartz crystal vibrator for measurement and the quartz crystal vibrator for reference. The quartz crystal vibrator for measurement has a first electrode that is contacted by a measurement sample to be detected, and a first quartz substrate provided with a surface on which the first electrode is formed. The quartz crystal vibrator for reference has a second electrode that is contacted by a reference sample as a reference when detecting a physical quantity of the measurement sample, and a second quartz substrate provided with a surface on which the second electrode is formed. A confining portion connects to the housing to confine the reference sample in a state of contacting the second electrode.
Public/Granted literature
- US20140165702A1 QCM SENSOR Public/Granted day:2014-06-19
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