Invention Grant
- Patent Title: Spatial light modulator and exposure apparatus
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Application No.: US14588841Application Date: 2015-01-02
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Publication No.: US09645390B2Publication Date: 2017-05-09
- Inventor: Junji Suzuki , Yoshihiko Suzuki
- Applicant: Nikon Corporation
- Applicant Address: JP Tokyo
- Assignee: Nikon Corporation
- Current Assignee: Nikon Corporation
- Current Assignee Address: JP Tokyo
- Agency: Klarquist Sparkman, LLP
- Priority: JP2012-148813 20120702
- Main IPC: G02B26/08
- IPC: G02B26/08 ; G03F7/20

Abstract:
The spatial light modulator is provided with: a substrate; a fixed electrode disposed on a surface of the substrate; a connecting section, which has one end of the connecting section connected to the surface of the substrate; a movable section, which is connected to another end of the connecting section; a supporting post section, which extends in the thickness direction of the substrate with one end of the supporting post section connected to the movable section; a reflecting member, which is connected to another end of the supporting post section; a movable electrode, which is disposed on a surface of the reflecting member, the surface of the reflecting member facing the fixed electrode; and a conductive layer, which is disposed on the supporting post section with a film thickness larger than that of the movable electrode, and which electrically connects between the movable section and the movable electrode.
Public/Granted literature
- US20150116684A1 SPATIAL LIGHT MODULATOR AND EXPOSURE APPARATUS Public/Granted day:2015-04-30
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