Spatial light modulator and exposure apparatus
Abstract:
The spatial light modulator is provided with: a substrate; a fixed electrode disposed on a surface of the substrate; a connecting section, which has one end of the connecting section connected to the surface of the substrate; a movable section, which is connected to another end of the connecting section; a supporting post section, which extends in the thickness direction of the substrate with one end of the supporting post section connected to the movable section; a reflecting member, which is connected to another end of the supporting post section; a movable electrode, which is disposed on a surface of the reflecting member, the surface of the reflecting member facing the fixed electrode; and a conductive layer, which is disposed on the supporting post section with a film thickness larger than that of the movable electrode, and which electrically connects between the movable section and the movable electrode.
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