Invention Grant
- Patent Title: Resist underlayer film forming composition containing low molecular weight dissolution accelerator
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Application No.: US12448130Application Date: 2007-12-11
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Publication No.: US09645494B2Publication Date: 2017-05-09
- Inventor: Masakazu Kato , Takahiro Hamada , Tomoyuki Enomoto
- Applicant: Masakazu Kato , Takahiro Hamada , Tomoyuki Enomoto
- Applicant Address: JP Tokyo
- Assignee: NISSAN CHEMICAL INDUSTRIES, LTD.
- Current Assignee: NISSAN CHEMICAL INDUSTRIES, LTD.
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2006-335723 20061213
- International Application: PCT/JP2007/073860 WO 20071211
- International Announcement: WO2008/072624 WO 20080619
- Main IPC: G03F7/09
- IPC: G03F7/09 ; G03F7/039 ; G03F7/30 ; G03F7/32 ; H01L21/027

Abstract:
There is provided a resist underlayer film forming composition that is used in a lithography process for the production of semiconductor devices and that can be developed with an alkaline developer for photoresists, and a method of forming a photoresist pattern by using the resist underlayer film forming composition. The resist underlayer film forming composition used in a lithography process for a production of a semiconductor device comprising: an alkali-soluble resin (a); a polynuclear phenol (b); a compound (c) having at least two vinylether groups; and a photoacid generator (d). The alkali-soluble resin (a) may be a polymer containing a unit structure having a carboxyl group, and the polynuclear phenol (b) may be a compound having 2 to 30 phenolic hydroxyl groups in the molecule.
Public/Granted literature
- US20100075253A1 RESIST UNDERLAYER FILM FORMING COMPOSITION CONTAINING LOW MOLECULAR WEIGHT DISSOLUTION ACCELERATOR Public/Granted day:2010-03-25
Information query
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