Developer and patterning process using the same
Abstract:
The present invention provides a developer for a photosensitive resist composition, comprising a compound represented by the general formula (1) wherein R1 to R6 represent a linear, branched, or cyclic alkyl group having 1 to 4 carbon atoms; and X represents a linear or branched alkylene group having 6 to 16 carbon atoms and optionally having an ester group. There can be provided a developer that can prevent the occurrence of pattern collapse and connection between patterns, i.e. bridge defect after development and can provide a resist pattern with small edge roughness.
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