Invention Grant
- Patent Title: Developer and patterning process using the same
-
Application No.: US14949418Application Date: 2015-11-23
-
Publication No.: US09645498B2Publication Date: 2017-05-09
- Inventor: Jun Hatakeyama
- Applicant: SHIN-ETSU CHEMICAL CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2015-000196 20150105
- Main IPC: G03F7/32
- IPC: G03F7/32 ; C07C211/63 ; G03F7/004 ; C07C381/12 ; C08F220/18 ; C08F220/38 ; C08F220/22 ; C08F220/30 ; H01L21/027 ; G03F7/039 ; G03F7/20 ; C07C219/16

Abstract:
The present invention provides a developer for a photosensitive resist composition, comprising a compound represented by the general formula (1) wherein R1 to R6 represent a linear, branched, or cyclic alkyl group having 1 to 4 carbon atoms; and X represents a linear or branched alkylene group having 6 to 16 carbon atoms and optionally having an ester group. There can be provided a developer that can prevent the occurrence of pattern collapse and connection between patterns, i.e. bridge defect after development and can provide a resist pattern with small edge roughness.
Public/Granted literature
- US20160195813A1 DEVELOPER AND PATTERNING PROCESS USING THE SAME Public/Granted day:2016-07-07
Information query
IPC分类: