Invention Grant
- Patent Title: Collector
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Application No.: US14210625Application Date: 2014-03-14
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Publication No.: US09645503B2Publication Date: 2017-05-09
- Inventor: Ingo Saenger , Joerg Zimmermann , Daniel Kraehmer , Johannes Ruoff , Martin Meier , Frank Schlesener , Christoph Hennerkes , Wolfgang Singer
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102011084266 20111011
- Main IPC: G03B27/54
- IPC: G03B27/54 ; G03F7/20 ; G21K1/06 ; G02B19/00 ; G02B27/28 ; B82Y10/00

Abstract:
A collector for a projection exposure apparatus for microlithography comprises a plurality of reflective sections which are embodied and arranged in such a way that they can be impinged upon during the focusing of radiation from a first focus into a second focus with angles of impingement in a predefined angular spectrum.
Public/Granted literature
- US20140192339A1 COLLECTOR Public/Granted day:2014-07-10
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