Parameter setting method and parameter setting apparatus for positioning apparatus, and positioning apparatus provided with the parameter setting apparatus
Abstract:
A parameter setting apparatus includes a calculator calculating a first resonance frequency ωr1 of a structure composed of a table, a rotor of a drive motor, and an object and a second resonance frequency ωr2 of a structure composed of a stator of the drive motor and a base using equations given below, and a setter setting a frequency band to be removed for a first damping filter based on the calculated first resonance frequency ωr1 and setting a frequency band to be removed for a second damping filter based on the second resonance frequency ωr2.
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