Invention Grant
- Patent Title: Method for fabricating a composite structure to be separated by exfoliation
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Application No.: US14345558Application Date: 2012-07-18
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Publication No.: US09646825B2Publication Date: 2017-05-09
- Inventor: Christophe Figuet , Christophe Gourdel
- Applicant: Christophe Figuet , Christophe Gourdel
- Applicant Address: FR Bernin
- Assignee: SOITEC
- Current Assignee: SOITEC
- Current Assignee Address: FR Bernin
- Agency: TraskBritt
- Priority: FR1158330 20110920
- International Application: PCT/IB2012/001405 WO 20120718
- International Announcement: WO2013/041926 WO 20130328
- Main IPC: H01L21/31
- IPC: H01L21/31 ; H01L21/469 ; H01L21/02 ; H01L21/762 ; H01L21/263 ; H01L21/304 ; H01L21/3105 ; H01L23/00 ; H01L29/06
Abstract:
The invention relates to a method for fabricating a composite structure comprising a layer to be separated by irradiation, the method comprising the formation of a stack containing: a support substrate formed from a material that is at least partially transparent at a determined wavelength; a layer to be separated; and a separation layer interposed between the support substrate and the layer to be separated, the separation layer being adapted to be separated by exfoliation under the action of radiation having a wavelength corresponding to the determined wavelength. Furthermore, the method comprises, during the step for forming the composite structure, a treatment step modifying the optical properties in reflection at an interface between the support substrate and the separation layer or on an upper face of the support substrate.
Public/Granted literature
- US20140339681A1 METHOD FOR FABRICATING A COMPOSITE STRUCTURE TO BE SEPARATED BY EXFOLIATION Public/Granted day:2014-11-20
Information query
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