Invention Grant
- Patent Title: Reacted particle deposition (RPD) method for forming a compound semi-conductor thin-film
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Application No.: US12185369Application Date: 2008-08-04
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Publication No.: US09646828B2Publication Date: 2017-05-09
- Inventor: Allan James Bruce , Sergey Frolov , Michael Cyrus
- Applicant: Allan James Bruce , Sergey Frolov , Michael Cyrus
- Applicant Address: US NJ Edison
- Assignee: SUNLIGHT PHOTONICS INC.
- Current Assignee: SUNLIGHT PHOTONICS INC.
- Current Assignee Address: US NJ Edison
- Agency: Mayer & Williams PC
- Agent Stuart H. Mayer
- Main IPC: H01L31/0296
- IPC: H01L31/0296 ; H01L21/02 ; H01L31/032 ; H01L31/0392 ; H01L31/18

Abstract:
A method is provided for fabricating a thin-film semiconductor device. The method includes providing a plurality of raw semiconductor materials. The raw semiconductor materials undergo a pre-reacting process to form a homogeneous compound semiconductor material. This pre-reaction typically includes processing above the liquidus temperature of the compound semiconductor. The compound semiconductor material is reduced to a particulate form and deposited onto a substrate to form a thin-film having a composition and atomic structure substantially the same as a composition and atomic structure of the compound semiconductor material.
Public/Granted literature
- US20100288358A1 REACTED PARTICLE DEPOSITION (RPD) METHOD FOR FORMING A COMPOUND SEMI-CONDUCTOR THIN-FILM Public/Granted day:2010-11-18
Information query
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