Invention Grant
- Patent Title: Disk-brush cleaner module with fluid jet
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Application No.: US12771969Application Date: 2010-04-30
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Publication No.: US09646859B2Publication Date: 2017-05-09
- Inventor: Hui Chen , Allen L. D'Ambra , Sen-Hou Ko , Yufei Chen , Adrian Blank , Mario D. Silvetti , Gerald J. Alonzo , Lakshmanan Karuppiah
- Applicant: Hui Chen , Allen L. D'Ambra , Sen-Hou Ko , Yufei Chen , Adrian Blank , Mario D. Silvetti , Gerald J. Alonzo , Lakshmanan Karuppiah
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: H01L21/67
- IPC: H01L21/67
Abstract:
Embodiments of the present invention relates to an apparatus and method for cleaning a substrate using a disk brush. One embodiment provides a substrate cleaner comprising a substrate chuck disposed in the processing volume, and a brush assembly disposed in the processing volume, wherein the brush assembly comprises a disk brush movably disposed opposing the substrate chuck, and a processing surface of the disk brush contacts a surface of the substrate on the substrate chuck.
Public/Granted literature
- US20110265816A1 DISK-BRUSH CLEANER MODULE WITH FLUID JET Public/Granted day:2011-11-03
Information query
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