Invention Grant
- Patent Title: Plasma processing apparatus, power supply unit and mounting table system
-
Application No.: US14519903Application Date: 2014-10-21
-
Publication No.: US09646867B2Publication Date: 2017-05-09
- Inventor: Masahiko Konno , Masayuki Shintaku , Takashi Suzuki , Michitaka Aita , Taizo Okada , Naohiko Okunishi , Hideo Kato , Naoki Matsumoto
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Rothwell, Figg, Ernst & Manbeck, P.C.
- Priority: JP2013-219281 20131022
- Main IPC: H01L21/683
- IPC: H01L21/683 ; H01J37/32 ; H01L21/67

Abstract:
A plasma processing apparatus includes a mounting table including a lower electrode and an electrostatic chuck, a high frequency power supply electrically connected to the lower electrode, a heater provided in the electrostatic chuck, a heater power supply for supplying a power to the heater, a filter unit including a filter connected to the heater power supply, a rod-shaped power feeder connecting the heater power supply and the heater via the filter, an insulating tubular portion having an inner hole through which the power feeder extends, and a conductive choke portion serving to suppress a microwave propagating through the tubular portion. The choke portion includes a first portion extending from the power feeder in a direction intersecting with a longitudinal direction of the power feeder and a cylindrical second portion extending, between the tubular portion and the power feeder, from a peripheral portion of the first portion.
Public/Granted literature
- US20150109716A1 PLASMA PROCESSING APPARATUS, POWER SUPPLY UNIT AND MOUNTING TABLE SYSTEM Public/Granted day:2015-04-23
Information query
IPC分类: