Invention Grant
- Patent Title: Gas barrier film and electronic device
-
Application No.: US13976300Application Date: 2011-12-01
-
Publication No.: US09646940B2Publication Date: 2017-05-09
- Inventor: Takahiro Mori
- Applicant: Takahiro Mori
- Applicant Address: JP Tokyo
- Assignee: KONICA MINOLTA, INC.
- Current Assignee: KONICA MINOLTA, INC.
- Current Assignee Address: JP Tokyo
- Agency: Lucas & Mercanti, LLP
- Priority: JP2010-289190 20101227
- International Application: PCT/JP2011/077837 WO 20111201
- International Announcement: WO2012/090644 WO 20120705
- Main IPC: H01L23/00
- IPC: H01L23/00 ; C23C14/06 ; C23C14/56 ; C23C26/00 ; C23C16/02 ; C23C16/30 ; C23C16/34 ; C23C28/04 ; C08J7/04

Abstract:
The gas barrier film including, on a base, a first gas barrier layer which is formed by a physical vapor deposition method or a chemical vapor deposition method and contains Si and N; and a second gas barrier layer which is formed by coating a solution containing a polysilazane compound, wherein the second gas barrier layer is subjected to conversion treatment by being irradiated with a vacuum ultraviolet ray; and, when the composition of each layer is represented by SiOxNy, the distribution of the composition SiOxNy of the second gas barrier layer in a thickness direction satisfies a condition specified in the following (A): (A) the second gas barrier layer includes 50 nm or more of a region of 0.25≦x≦1.1 and 0.4≦y≦0.75 in the thickness direction.
Public/Granted literature
- US20130280521A1 GAS BARRIER FILM AND ELECTRONIC DEVICE Public/Granted day:2013-10-24
Information query
IPC分类: