Invention Grant
- Patent Title: Multi-layer structure for high aspect ratio etch
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Application No.: US14620460Application Date: 2015-02-12
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Publication No.: US09647022B2Publication Date: 2017-05-09
- Inventor: Tsai-Hao Hung , Han-Tang Lo , Shih-Chi Kuo , Tsung-Hsien Lee
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L21/266
- IPC: H01L21/266 ; H01L21/761 ; H01L21/265 ; H01L27/146

Abstract:
The present disclosure relates to a method of forming a masking structure having a trench with a high aspect ratio, and an associated structure. In some embodiments, the method is performed by forming a first material over a substrate. The first material is selectively etched and a second material is formed onto the substrate at a position abutting sidewalls of the first material, resulting in a pillar of sacrificial material surrounded by a masking material. The pillar of sacrificial material is removed, resulting in a masking layer having a trench that extends into the masking material. Using the pillar of sacrificial material during formation of the trench allows the trench to have a high aspect ratio. For example, the sacrificial material allows for a plurality of masking layers to be iteratively formed to have laterally aligned openings that collectively form a trench extending through the masking layers.
Public/Granted literature
- US20160240568A1 MULTI-LAYER STRUCTURE FOR HIGH ASPECT RATIO ETCH Public/Granted day:2016-08-18
Information query
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