Invention Grant
- Patent Title: Electronic device of vertical MOS type with termination trenches having variable depth
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Application No.: US14949333Application Date: 2015-11-23
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Publication No.: US09647061B2Publication Date: 2017-05-09
- Inventor: Angelo Magri , Giacomo Barletta
- Applicant: STMICROELECTRONICS S.R.L.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group LLP
- Priority: ITMI20140116 20140129
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L21/332 ; H01L21/338 ; H01L21/336 ; H01L29/06 ; H01L29/78 ; H01L29/739

Abstract:
An electronic device is integrated on a chip of semiconductor material having a main surface and a substrate region with a first type of conductivity. The electronic device has a vertical MOS transistor, formed in an active area having a body region with a second conductivity type. A set of one or more cells each one having a source region of the first conductivity, a gate region of electrically conductive material in a gate trench extending from the main surface in the body region and in the substrate region, and an insulating gate layer, and a termination structure with a plurality of termination rings surrounding at least part of the active area on the main surface, each termination ring having a floating element of electrically insulating material in the termination trench extending from the main surface in the chip and at least one bottom region of said semiconductor material of the second conductivity type extending from at least one deepest portion of a surface of the termination trench in the chip; the termination trenches have a depth from the main surface decreasing moving away from the active area.
Public/Granted literature
- US20160079356A1 ELECTRONIC DEVICE OF VERTICAL MOS TYPE WITH TERMINATION TRENCHES HAVING VARIABLE DEPTH Public/Granted day:2016-03-17
Information query
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