Invention Grant
- Patent Title: Long wave photo-detection device for used in long wave infrared detection, materials, and method of fabrication
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Application No.: US14022092Application Date: 2013-09-09
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Publication No.: US09647155B1Publication Date: 2017-05-09
- Inventor: Shimon Maimon
- Applicant: Shimon Maimon
- Agency: Saltamar Innovations
- Agent Shalom Wertsberger
- Main IPC: H01L31/102
- IPC: H01L31/102 ; H01L31/0352 ; H01L31/0304 ; H01L31/18

Abstract:
The disclosure provides a photo-detection device for use in long-wave infrared detection and a method of fabrication. The device comprises a GaSb substrate, a photo absorbing layer comprising InAs/InAsSb superlattice type-II, a barrier layer comprising AlAsSb, and a contact layer comprising InAs/InAsSb superlattice type-II. The barrier layer is configured to allow minority carrier holes current flow while blocking majority carrier electrons current flow between the photo-absorbing and contact layers.The disclosure further provides a method of producing the photo-detector using photolithography which includes selective etching of the contact layer that stops on the top of the barrier so no etching is made to the barrier layer so the barrier may operate as a passivator too.The disclosure presents an x-ray and photoluminescence results for InAs/InAsSb superlattice type-II material. Also present a measurement of a single element, Long-Wave photo-detector, showing very low dark current and very high Quantum efficiency, as predicted.
Information query
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