Invention Grant
- Patent Title: Method and apparatus for manufacturing organic EL device
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Application No.: US14114142Application Date: 2012-04-06
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Publication No.: US09647224B2Publication Date: 2017-05-09
- Inventor: Ryohei Kakiuchi , Shigenori Morita , Kanako Hida
- Applicant: Ryohei Kakiuchi , Shigenori Morita , Kanako Hida
- Applicant Address: JP Osaka
- Assignee: NITTO DENKO CORPORATION
- Current Assignee: NITTO DENKO CORPORATION
- Current Assignee Address: JP Osaka
- Agent Adele Critchley
- Priority: JP2011-098172 20110426
- International Application: PCT/JP2012/059439 WO 20120406
- International Announcement: WO2012/147493 WO 20121101
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L51/50 ; C23C14/24 ; H05B33/10 ; H01L51/00 ; C23C14/12 ; C23C14/56 ; H01L51/56

Abstract:
Provided is a method for manufacturing an organic EL device, including: a vapor deposition step of forming an organic layer over a substrate moving relative to a nozzle by discharging a vaporized organic layer-forming material through the nozzle. The vapor deposition step is performed so that a light emitting region formed of the organic layer and having a width A (mm) in a direction perpendicular to a direction in which the substrate is moving is formed, and so that W≧A+2×h (where h≦5 mm) is satisfied, where a length of an opening of the nozzle in the direction perpendicular to the direction in which the substrate is moving is denoted by W (mm), and a distance between the opening and the substrate is denoted by h (mm).
Public/Granted literature
- US20140051198A1 METHOD AND APPARATUS FOR MANUFACTURING ORGANIC EL DEVICE Public/Granted day:2014-02-20
Information query
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