Invention Grant
- Patent Title: Laser unit and extreme ultraviolet light generating system
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Application No.: US15172757Application Date: 2016-06-03
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Publication No.: US09647406B2Publication Date: 2017-05-09
- Inventor: Takashi Suganuma , Takayuki Yabu , Osamu Wakabayashi , Seiji Nogiwa
- Applicant: GIGAPHOTON INC.
- Applicant Address: JP Tochigi
- Assignee: GIGAPHOTON INC.
- Current Assignee: GIGAPHOTON INC.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Priority: WOPCT/JP2014/051675 20140127
- Main IPC: H01S3/00
- IPC: H01S3/00 ; H01S3/23 ; H05G2/00 ; H01S3/223

Abstract:
There is provided a laser unit that may include a master oscillator, a laser amplifier, and an adjuster. The master oscillator may be configured to output a laser light beam. The laser amplifier may be disposed in a light path of the laser light beam outputted from the master oscillator. The adjuster may be disposed in the light path of the laser light beam, and may be configured to adjust a beam cross-sectional shape of the laser light beam amplified by the laser amplifier to be a substantially circular shape. The beam cross-sectional shape may be at a beam waist of the laser light beam or in the vicinity of the beam waist of the laser light beam, and may be in a plane orthogonal to a light path axis.
Public/Granted literature
- US20160285222A1 LASER UNIT AND EXTREME ULTRAVIOLET LIGHT GENERATING SYSTEM Public/Granted day:2016-09-29
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