- Patent Title: Electronic device and method for manufacturing electronic device
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Application No.: US14940520Application Date: 2015-11-13
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Publication No.: US09648741B2Publication Date: 2017-05-09
- Inventor: Yoriko Mizushima
- Applicant: FUJITSU LIMITED
- Applicant Address: JP Kawasaki
- Assignee: FUJITSU LIMITED
- Current Assignee: FUJITSU LIMITED
- Current Assignee Address: JP Kawasaki
- Agency: Kratz, Quintos & Hanson, LLP
- Priority: JP2014-253137 20141215
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L23/52 ; H05K1/11 ; H05K3/40 ; H05K1/02

Abstract:
An electronic device includes; a first substrate; a second substrate Located facing the first substrate; a resin layer formed between the first substrate and the second substrate and having a first thermal expansion coefficient; a conductor via penetrating the first substrate and the resin layer; a barrier film covering a side surface of the conductor via; a first film formed between the resin layer and the barrier film and having viscoelasticity; and a second film formed between the first film and the barrier film and having a second thermal expansion coefficient lower than the first thermal expansion coefficient.
Public/Granted literature
- US20160174375A1 ELECTRONIC DEVICE AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE Public/Granted day:2016-06-16
Information query
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