Invention Grant
- Patent Title: System and method for gas recovery and reuse
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Application No.: US14567353Application Date: 2014-12-11
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Publication No.: US09649590B2Publication Date: 2017-05-16
- Inventor: Christopher Michael Albright , Gregory Khosrov Arslanian , Andrew David Johnson , David Charles Winchester
- Applicant: AIR PRODUCTS AND CHEMICALS, INC.
- Applicant Address: US PA Allentown
- Assignee: VERSUM MATERIALS US, LLC
- Current Assignee: VERSUM MATERIALS US, LLC
- Current Assignee Address: US PA Allentown
- Agent Anne B. Kiernan
- Main IPC: B01D53/22
- IPC: B01D53/22 ; C01B23/00
Abstract:
Process gas(es), such as but not limited to helium, can be used in the manufacture of a variety of objects. Described herein are methods to collect, reuse, and recycle the process gas(es) that are used in the production process rather than treat these materials as waste.
Public/Granted literature
- US20150196870A1 SYSTEM AND METHOD FOR GAS RECOVERY AND REUSE Public/Granted day:2015-07-16
Information query
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