Invention Grant
- Patent Title: Method and apparatus for a seal ring structure
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Application No.: US15067043Application Date: 2016-03-10
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Publication No.: US09650243B2Publication Date: 2017-05-16
- Inventor: Ting-Ying Chen , Yi Hsun Chiu , Ching-Hou Su , Chyi-Tsong Ni
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater Matsil, LLP
- Main IPC: H01L21/78
- IPC: H01L21/78 ; B81C1/00 ; H01L23/10 ; H01L21/50 ; H01L23/00 ; H01L21/66

Abstract:
A wafer seal ring may be formed on a first and/or a second wafer. One or both of the first and/or second wafers may have one or more dies formed thereon. The wafer seal ring may be formed to surround the dies of a corresponding wafer. One or more die seal rings may be formed around the one or more dies. The wafer seal ring may be formed to a height that may be approximately equal to a height of one or more die seal rings formed on the first and/or second wafer. The wafer seal ring may be formed to provide for eutectic or fusion bonding processes. The first and second wafers may be bonded together to form a seal ring structure between the first and second wafers. The seal ring structure may provide a hermetic seal between the first and second wafers.
Public/Granted literature
- US20160194199A1 Method and Apparatus for a Seal Ring Structure Public/Granted day:2016-07-07
Information query
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