Invention Grant
- Patent Title: Magnetic device, vapor deposition device and vapor deposition method
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Application No.: US14435119Application Date: 2014-08-28
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Publication No.: US09650709B2Publication Date: 2017-05-16
- Inventor: Dejiang Zhao , Haoran Gao , Jianwei Yu , Jie Yin
- Applicant: BOE TECHNOLOGY GROUP CO., LTD.
- Applicant Address: CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee Address: CN Beijing
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: CN201410159125 20140418
- International Application: PCT/CN2014/085426 WO 20140828
- International Announcement: WO2015/158093 WO 20151022
- Main IPC: C23C16/00
- IPC: C23C16/00 ; C23C14/04 ; C23C14/54 ; C23C14/12

Abstract:
The present disclosure provides a magnetic device and a vapor deposition device. The magnetic device is configured to adsorb a metal mask in the vapor deposition device, including: a metal plate; an electromagnet array including a plurality of electromagnets; each of the electromagnets being inserted in the metal plate; a power supply module configured to supply a current; a control module configured to, when adsorbing the metal mask during a vapor deposition process, control the power supply module to supply a direct current to all or some of the plurality of electromagnets and control a direction and a size of the direct current by sending a first control signal to the power supply module.
Public/Granted literature
- US20160251747A1 MAGNETIC DEVICE, VAPOR DEPOSITION DEVICE AND VAPOR DEPOSITION METHOD Public/Granted day:2016-09-01
Information query
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