Invention Grant
- Patent Title: Efficient and simple method for metalorganic chemical vapor deposition
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Application No.: US13627758Application Date: 2012-09-26
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Publication No.: US09650711B2Publication Date: 2017-05-16
- Inventor: Calum R. I. Chisholm , Alex Papandrow
- Applicant: SAFCELL, INC.
- Applicant Address: US CA Pasadena
- Assignee: California Institute of Technology, Office of Technology Transfer
- Current Assignee: California Institute of Technology, Office of Technology Transfer
- Current Assignee Address: US CA Pasadena
- Agency: Kilpatrick, Townsend & Stockton LLP
- Main IPC: C23C16/18
- IPC: C23C16/18 ; C23C16/40 ; C23C16/44 ; H01M4/88 ; H01M4/92 ; H01M8/1016
Abstract:
The present invention provides a method of preparing metal or metal oxide particles on a substrate by forming a reaction mixture of a metal or metal oxide precursor and a substrate, and heating the reaction mixture at reduced pressure, such that metal or metal oxide particles are formed on the substrate.
Public/Granted literature
- US20130273246A1 EFFICIENT AND SIMPLE METHOD FOR METALORGANIC CHEMICAL VAPOR DEPOSITION Public/Granted day:2013-10-17
Information query
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