Encoder scale and method of manufacturing the same
Abstract:
An encoder scale for an electromagnetic induction linear encoder includes a substrate, an electroconductive layer exhibiting electroconductivity and provided to one surface of the substrate, and an electric conductor provided on the electroconductive layer. The electroconductive layer is wider than the electric conductor in a plan view of the substrate and is grounded. The electroconductive layer is formed on the entire one surface of the substrate except a guide surface, and glass is exposed on the guide surface.
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