Invention Grant
- Patent Title: MEMS optical device comprising a MEMS magnetic sensing mechansim and MEMS light absorbing structure
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Application No.: US15206297Application Date: 2016-07-10
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Publication No.: US09651423B1Publication Date: 2017-05-16
- Inventor: Biao Zhang
- Applicant: Biao Zhang
- Main IPC: G01J3/42
- IPC: G01J3/42 ; G02B5/122
Abstract:
A MEMS optical device and an array composed thereof are disclosed herein, wherein the MEMS optical device comprises a light absorbing element, a deforming element, and a magnetic detector, wherein the magnetic detector comprises a magnetic source and a magnetic sensor.
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