Invention Grant
- Patent Title: Pressure sensor device with high sensitivity and high accuracy
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Application No.: US14704012Application Date: 2015-05-05
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Publication No.: US09651441B2Publication Date: 2017-05-16
- Inventor: Jen-Huang Albert Chiou , Shiuh-Hui Steven Chen
- Applicant: Continental Automotive Systems, Inc.
- Applicant Address: US MI Auburn Hills
- Assignee: Continental Automotive Systems, Inc.
- Current Assignee: Continental Automotive Systems, Inc.
- Current Assignee Address: US MI Auburn Hills
- Main IPC: G01L9/00
- IPC: G01L9/00 ; H01L41/332 ; H01L41/23 ; H01L41/312 ; H01L41/113 ; B81B3/00 ; B81B7/02 ; B81C1/00

Abstract:
The voltages output from a low-pressure MEMS sensor are increased by increasing the sensitivity of the sensor. Sensitivity is increased by thinning the diaphragm of the low pressure sensor device with corner trench. Nonlinearity increased by thinning the diaphragm is reduced by simultaneously creating a cross stiffener to the bottom side of the diaphragm. A rim, anchors, and a stiffener pad can also be added to further stiffen the thinner diaphragm and further reduce pressure nonlinearity.
Public/Granted literature
- US20150330856A1 PRESSURE SENSOR DEVICE WITH HIGH SENSITIVITY AND HIGH ACCURACY Public/Granted day:2015-11-19
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