Reducing background fluorescence in MEMS materials by low energy ion beam treatment
Abstract:
Methods for fabricating materials useful for optical detection in microfluidic and nanofluidic devices, such as those used in nanopore-based nucleic acid sequencing are described herein. In certain variations, a method of reducing background fluorescence in a MEMS material may include the step of treating a surface of the MEMS material with a low energy ion beam.
Information query
Patent Agency Ranking
0/0