System and apparatus for measuring capacitance
Abstract:
Systems and methods for determining a capacitance on a device-under-test (“DUT”). An example implementation includes a voltage signal generator that generates a voltage signal alternating between a high voltage and a low voltage at regular time intervals. The voltage signal generator causes a DUT current to flow in the DUT. The DUT current comprises a leakage current and a capacitance measurement current in response to the voltage signal. A current signal generator receives the DUT current from the DUT. The current signal generator generates a cancellation current signal alternating between high and low values at the regular time intervals of the voltage signal such that the cancellation current signal cancels the leakage current through the DUT. A signal measurement circuit receives the capacitance measurement current remaining after the leakage current is canceled to generate an output voltage having an output voltage value used to determine a capacitance of the DUT.
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