Invention Grant
- Patent Title: Visible laser probing for circuit debug and defect analysis
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Application No.: US13931869Application Date: 2013-06-29
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Publication No.: US09651610B2Publication Date: 2017-05-16
- Inventor: Travis M. Eiles , Rajiv Giridharagopal , David Shykind
- Applicant: Travis M. Eiles , Rajiv Giridharagopal , David Shykind
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Blakely, Sokoloff, Taylor & Zafman LLP
- Main IPC: G01R31/28
- IPC: G01R31/28 ; G01R31/265

Abstract:
Visible laser probing is described. In one example a probe device has a laser configured to provide a laser beam at a visible wavelength, an objective lens positioned in front of the laser to focus the laser beam on an active region of an integrated circuit through a back side of an integrated circuit die, and a detector positioned to receive a reflected laser beam reflected from the active region through a back side of the die, through the objective lens. The detector is configured to detect an amplitude modulation of the reflected laser beam wherein the amplitude modulation is attributable to the electric field at the active region.
Public/Granted literature
- US20150002182A1 VISIBLE LASER PROBING FOR CIRCUIT DEBUG AND DEFECT ANALYSIS Public/Granted day:2015-01-01
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