Invention Grant
- Patent Title: Interference filter, optical filter device, optical module, and electronic apparatus
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Application No.: US14486283Application Date: 2014-09-15
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Publication No.: US09651770B2Publication Date: 2017-05-16
- Inventor: Susumu Shinto , Akira Sano
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2013-201047 20130927
- Main IPC: G02B26/00
- IPC: G02B26/00 ; G01J3/26 ; G01J3/51 ; G02B5/28 ; G02B1/11
Abstract:
A variable wavelength interference filter includes a stationary substrate, a stationary reflecting film disposed on the entire surface of the stationary substrate opposed to a movable substrate, and formed of a multilayer film, a movable reflecting film opposed to the stationary reflecting film, and a first mirror electrode disposed on the stationary reflecting film.
Public/Granted literature
- US20150092272A1 INTERFERENCE FILTER, OPTICAL FILTER DEVICE, OPTICAL MODULE, AND ELECTRONIC APPARATUS Public/Granted day:2015-04-02
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