Invention Grant
- Patent Title: Arrangement for the actuation of at least one element in an optical system
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Application No.: US14795458Application Date: 2015-07-09
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Publication No.: US09651772B2Publication Date: 2017-05-16
- Inventor: Markus Hauf , Martin Latzel , Edwin Johan Buis
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102013204305 20130313
- Main IPC: G03B27/54
- IPC: G03B27/54 ; G02B26/08 ; G02B7/182 ; G03F7/20 ; G02B5/09 ; G02B7/18

Abstract:
An arrangement for the actuation of an element in an optical system. The arrangement includes first actuation and second actuation units for tilting the element about at least two different tilting axes. The first and second actuation units respectively include a flexure unit arranged outside an area defined by the element. Each flexure unit includes a first flexing element, rotatable with respect to a first axis of rotation, and a second flexing element, rotatable with respect to a second axis of rotation. For each flexure unit, the two associated axes of rotation intersect at a virtual connecting point of the flexure unit concerned to the optical element. The virtual connecting point is arranged in the area defined by the element and defines a rotating point for the element.
Public/Granted literature
- US20150309305A1 ARRANGEMENT FOR THE ACTUATION OF AT LEAST ONE ELEMENT IN AN OPTICAL SYSTEM Public/Granted day:2015-10-29
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