Invention Grant
- Patent Title: Projection lens with wavefront manipulator
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Application No.: US14838532Application Date: 2015-08-28
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Publication No.: US09651872B2Publication Date: 2017-05-16
- Inventor: Heiko Feldmann
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102013204391 20130313
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G02B26/06 ; G02B27/09 ; G02B27/00
Abstract:
A projection lens for imaging a pattern arranged in an object plane of the projection lens into an image plane of the projection lens via electromagnetic radiation having an operating wavelength λ
Public/Granted literature
- US20150370172A1 PROJECTION LENS WITH WAVEFRONT MANIPULATOR Public/Granted day:2015-12-24
Information query
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