Invention Grant
- Patent Title: Directed self-assembly-aware layout decomposition for multiple patterning
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Application No.: US14745231Application Date: 2015-06-19
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Publication No.: US09652581B2Publication Date: 2017-05-16
- Inventor: Fedor Pikus , Juan Andres Torres Robles , Joydeep Mitra
- Applicant: Mentor Graphics Corporation
- Applicant Address: US OR Wilsonville
- Assignee: Mentor Graphics Corporation
- Current Assignee: Mentor Graphics Corporation
- Current Assignee Address: US OR Wilsonville
- Agency: Banner & Witcoff, Ltd.
- Main IPC: G06F17/50
- IPC: G06F17/50

Abstract:
Aspects of the disclosed technology relate to techniques of combining directed self-assembly lithography and multiple patterning lithography. A coloring/grouping graph is first generated from layout data of a layout design. In the coloring/grouping graph, each coloring edge connects two nodes representing layout features that must be assigned to different masks, and each grouping/coloring edge connects two nodes representing layout features that should either be grouped together for DSA (directed-self-assembly) lithography or be assigned to different masks for multiple patterning lithography. The node groups formed by nodes connected with the coloring edges are colored. Colors of the nodes in one or more of node groups connected by the grouping/coloring edges are adjusted to convert one or more of the grouping/coloring edges into the coloring edges. After conversion, layout features represented by the nodes directly connected with the grouping/coloring edges are grouped together for generating guiding patterns.
Public/Granted literature
- US20160292345A1 Directed Self-Assembly-Aware Layout Decomposition For Multiple Patterning Public/Granted day:2016-10-06
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