A method of making a semiconductor device is described. The method comprises depositing a first polysilicon layer in a non-volatile memory (NVM) region and a logic region of a substrate. A first coating layer is deposited over the first polysilicon layer. The first coating layer and the first polysilicon layer are patterned to form a first gate in the NVM region. A memory cell is formed including the first gate. The first coating layer and the first layer of polysilicon in the logic region are removed and a logic gate polysilicon layer is deposited. The logic gate polysilicon layer is patterned to form a second gate in the logic region while the logic gate polysilicon layer is removed from the NVM region. Source/drain regions of the memory cell and the second gate are implanted concurrently.