Invention Grant
- Patent Title: Pillar-shaped semiconductor memory device and method for producing the same
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Application No.: US15228687Application Date: 2016-08-04
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Publication No.: US09653170B2Publication Date: 2017-05-16
- Inventor: Fujio Masuoka , Nozomu Harada
- Applicant: Unisantis Electronics Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: UNISANTIS ELECTRONICS SINGAPORE PTE. LTD.
- Current Assignee: UNISANTIS ELECTRONICS SINGAPORE PTE. LTD.
- Current Assignee Address: SG Singapore
- Agency: Brinks Gilson & Lione
- Main IPC: G11C16/04
- IPC: G11C16/04 ; H01L27/115 ; G11C16/10 ; G11C16/14 ; H01L27/11556 ; H01L27/11582

Abstract:
A pillar-shaped semiconductor memory device includes Si pillars arranged in at least two rows; a tunnel insulating layer; a data charge storage insulating layer; first, second, and third interlayer insulating layers; and first and second conductor layers, all of which surround outer peripheries of the Si pillars, the first and second conductor layers being located at the same height in a perpendicular direction. A row of the semiconductor pillars is interposed between the first and second conductor layers of Si pillars arranged in an X direction. Shapes of the first and second conductor layers facing the semiconductor pillars are circular arcs. Adjacent circular arcs of the first conductor layer are in contact with each other, and adjacent circular arcs of the second conductor layer are in contact with each other. A pitch length of the Si pillars in the X direction is smaller than that in a Y direction.
Public/Granted literature
- US20160343442A1 PILLAR-SHAPED SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR PRODUCING THE SAME Public/Granted day:2016-11-24
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