Invention Grant
- Patent Title: Method for connecting magnetic substance target to backing plate, and magnetic substance target
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Application No.: US12023588Application Date: 2008-01-31
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Publication No.: US09653270B2Publication Date: 2017-05-16
- Inventor: Yasuhiro Yamakoshi , Kenichi Mogaki
- Applicant: Yasuhiro Yamakoshi , Kenichi Mogaki
- Applicant Address: JP Tokyo
- Assignee: JX Nippon Mining & Metals Corporation
- Current Assignee: JX Nippon Mining & Metals Corporation
- Current Assignee Address: JP Tokyo
- Agency: Howson & Howson, LLP
- Priority: JP2001-385666 20011219
- Main IPC: C23C14/35
- IPC: C23C14/35 ; H01J37/34 ; H01J37/32 ; C23C14/34

Abstract:
A method for connecting a magnetic substance target to a backing plate with less variation in plate thickness, characterized in having the steps of connecting the magnetic substance target to an aluminum plate beforehand while maintaining the flatness, connecting the magnetic substance target connected to the aluminum plate to the backing plate while maintaining the flatness, and grinding out the aluminum plate, whereby the flatness of the magnetic substance target can be maintained until the magnetic substance target is connected to the backing plate by a relatively simple operation.
Public/Granted literature
- US20090008245A1 Method for Connecting Magnetic Substance Target to Backing Plate, and Magnetic Substance Target Public/Granted day:2009-01-08
Information query
IPC分类: