Invention Grant
- Patent Title: Transport arm, transport apparatus and transport method
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Application No.: US14071060Application Date: 2013-11-04
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Publication No.: US09653337B2Publication Date: 2017-05-16
- Inventor: Yoshihiro Inao , Satoshi Kobari , Akihiko Nakamura
- Applicant: Tokyo Ohka Kogyo Co., Ltd.
- Applicant Address: JP Kawasaki-Shi
- Assignee: TOKYO OHKA KOGYO CO., LTD.
- Current Assignee: TOKYO OHKA KOGYO CO., LTD.
- Current Assignee Address: JP Kawasaki-Shi
- Agency: Knobbe, Martens Olson & Bear, LLP
- Priority: JP2012-273989 20121214
- Main IPC: H01L21/683
- IPC: H01L21/683
Abstract:
A transport arm including a holding unit that holds a substrate by vacuum adsorption. The holding unit has an air discharge port and an adsorption member formed so as to surround the air discharge port. The adsorption member is a squeeze packing.
Public/Granted literature
- US20140169929A1 TRANSPORT ARM, TRANSPORT APPARATUS AND TRANSPORT METHOD Public/Granted day:2014-06-19
Information query
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