Invention Grant
- Patent Title: Methods of forming self-aligned device level contact structures
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Application No.: US14822340Application Date: 2015-08-10
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Publication No.: US09653356B2Publication Date: 2017-05-16
- Inventor: Chanro Park , Ruilong Xie , Min Gyu Sung , Hoon Kim
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L21/02 ; H01L27/088 ; H01L21/311 ; H01L29/66 ; H01L21/3105 ; H01L29/40 ; H01L29/417 ; H01L21/8234

Abstract:
One illustrative method disclosed includes, among other things, forming a silicon dioxide etch stop layer on and in contact with a source/drain region and adjacent silicon nitride sidewall spacers positioned on two laterally spaced-apart transistors having silicon dioxide gate cap layers, performing a first etching process through an opening in a layer of insulating material to remove the silicon nitride material positioned above the source/drain region, performing a second etching process to remove a portion of the silicon dioxide etch stop layer and thereby expose a portion of the source/drain region, and forming a conductive self-aligned contact that is conductively coupled to the source/drain region.
Public/Granted literature
- US20170047253A1 METHODS OF FORMING SELF-ALIGNED DEVICE LEVEL CONTACT STRUCTURES Public/Granted day:2017-02-16
Information query
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