Invention Grant
- Patent Title: Semiconductor device and method of manufacturing semiconductor device
-
Application No.: US15252623Application Date: 2016-08-31
-
Publication No.: US09653599B2Publication Date: 2017-05-16
- Inventor: Yusuke Kobayashi , Manabu Takei , Shinsuke Harada
- Applicant: FUJI ELECTRIC CO., LTD. , NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- Applicant Address: JP Kawasaki-Shi, Kanagawa JP Tokyo
- Assignee: FUJI ELECTRIC CO., LTD.,NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- Current Assignee: FUJI ELECTRIC CO., LTD.,NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- Current Assignee Address: JP Kawasaki-Shi, Kanagawa JP Tokyo
- Agency: Rabin & Berdo, P.C.
- Priority: JP2015-206285 20151020
- Main IPC: H01L29/15
- IPC: H01L29/15 ; H01L31/0312 ; H01L29/78 ; H01L29/16 ; H01L29/66 ; H01L29/06

Abstract:
In a front surface of a semiconductor base body, a gate trench is disposed penetrating an n+-type source region and a p-type base region to a second n-type drift region. In the second n-type drift region, a p-type semiconductor region is selectively disposed. Between adjacent gate trenches, a contact trench is disposed penetrating the n+-type source region and the p-type base region, and going through the second n-type drift region to the p-type semiconductor region. A source electrode embedded in the contact trench contacts the p-type semiconductor region at a bottom portion and corner portion of the contact trench, and forms a Schottky junction with the second n-type drift region at a side wall of the contact trench.
Public/Granted literature
- US20170110571A1 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE Public/Granted day:2017-04-20
Information query
IPC分类: