Invention Grant
- Patent Title: Transistor device with vertical carbon nanotube (CNT) arrays or non-vertical tapered CNT arrays
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Application No.: US14744132Application Date: 2015-06-19
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Publication No.: US09653695B2Publication Date: 2017-05-16
- Inventor: Qing Cao , Kangguo Cheng , Zhengwen Li , Fei Liu , Zhen Zhang
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: H01L29/775
- IPC: H01L29/775 ; H01L21/336 ; H01L51/05 ; H01L27/28 ; H01L51/00 ; B82Y10/00 ; B82Y40/00

Abstract:
A transistor device includes an array of fin structures arranged on a substrate, each of the fin structures being vertically alternating stacks of a first isoelectric point material having a first isoelectric point and a second isoelectric point material having a second isoelectric point that is different than the first isoelectric point; one or more carbon nanotubes (CNTs) suspended between the fin structures and contacting a side surface of the second isoelectric point material in the fin structures; a gate wrapped around the array of CNTs; and source and drain contacts arranged over the fin structures; wherein each of the fin structures have a trapezoid shape or parallel sides that are oriented about 90° with respect to the substrate.
Public/Granted literature
- US20160293668A1 SELF-ALIGNED VERTICAL CNT ARRAY TRANSISTOR Public/Granted day:2016-10-06
Information query
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