Invention Grant
- Patent Title: Laser processing method for forming a laser processed hole in a work piece
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Application No.: US15013103Application Date: 2016-02-02
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Publication No.: US09656347B2Publication Date: 2017-05-23
- Inventor: Hiroshi Morikazu
- Applicant: Disco Corporation
- Applicant Address: JP Tokyo
- Assignee: DISCO CORPORATION
- Current Assignee: DISCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Greer Burns & Crain, Ltd.
- Priority: JP2012-026265 20120209
- Main IPC: B23K26/38
- IPC: B23K26/38 ; B23K26/03 ; B23K26/40 ; B23K26/386 ; B23K26/0622 ; B23K103/16

Abstract:
A laser processing method for forming a laser processed hole in a workpiece having a first member including a first material and a second member including a second material, the laser processed hole extending from the first member to the second member, the laser processing method including: applying a pulsed laser beam to the workpiece; using a plasma detecting means to detect the wavelength of plasma light generated by applying the pulsed laser beam to the workpiece; controlling, via a controller, a laser beam applying means according to a detection signal from the plasma detecting means; and stopping the application of the pulsed laser beam when both: (i) the light intensity detected by a first photodetector is decreased, and (ii) the light intensity detected by a second photodetector is increased to a peak value and next decreased to a given value that is slightly less than the peak value.
Public/Granted literature
- US20160158891A1 LASER PROCESSING APPARATUS SUITABLE FOR FORMATION OF LASER PROCESSED HOLE Public/Granted day:2016-06-09
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