Invention Grant
- Patent Title: Coaxial drive vacuum robot
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Application No.: US13270844Application Date: 2011-10-11
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Publication No.: US09656386B2Publication Date: 2017-05-23
- Inventor: Robert T. Caveney , Ulysses Gilchrist
- Applicant: Robert T. Caveney , Ulysses Gilchrist
- Applicant Address: US MA Chelmsford
- Assignee: Brooks Automation, Inc.
- Current Assignee: Brooks Automation, Inc.
- Current Assignee Address: US MA Chelmsford
- Agency: Perman & Green, LLP
- Agent Colin C. Durham
- Main IPC: B25J9/04
- IPC: B25J9/04 ; H01L21/677

Abstract:
A robotic transport apparatus including a drive system including at least one harmonic motor assembly, at least one drive shaft coupled to the at least one harmonic motor assembly, at least one robotic arm mounted to the at least one drive shaft, where the robotic arm is located inside a sealed environment, and at least one atmospheric isolation seal seated on an output surface of the drive system and forming an atmospheric barrier disposed so that the at least one drive shaft extends through the atmospheric barrier into the sealed environment and the at least one harmonic motor assembly is located outside the sealed environment, wherein the robotic transport apparatus is a high capacity payload transport apparatus.
Public/Granted literature
- US20120128450A1 COAXIAL DRIVE VACUUM ROBOT Public/Granted day:2012-05-24
Information query
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